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The Auto SAM series stands for customized, fully automated- or semi-automated auto SAM systems. We develope in close cooperation with the customer special solutions for almost every kind of sample analysis. Our long years of experience based on reams of solutions in industrial SAM ultrasonic inspection of every kind (automotive, frontend, backend, semiconductor, wafer, IC-packages, IGBT, Air&Defense, Aerospace,…). Semi- or fully automated standalone constructions as well as inline systems are developed for individual concepts. Fastest scanning systems provide the highest throughput for industrial applications with KSI one- and multichannel Scanning Acoustic Microscopes.

Key features of the Auto SAM

  • Product line for industrial applications
  • Standalone and inline systems
  • Customized solutions
  • Semi- and fully automated inspections
  • Automated error detection
  • Multilayer sample evaluation
  • Individual sample holder

i-wafer_1317218833Auto SAM / Auto-Wafer

Automated wafer bond inspection. Together with the new developed scanning mechanic of the v-series and the new patent pending transducer shape highest scanspeeds are reached. Combined with a customized manual wafer cartridge or an automated wafer-handler the time of inspection is reduced up to 30% compared to other SAM-systems. The Auto-wafer is an advanced instrument which automatically handles and inspects wafers on operator-selected accept/reject criteria. With the help of the i-Wafer voids, delamiantions or inclusions inside wafers and its structures can be detected. The inspection of multiple wafers up to a size of 450 mm is already applicable.

Key features of the Auto-Wafer

  • Extremly high scanspeed
  • On average 30% less scanning time compared to competetive products
  • Robust construction with granite platform
  • Adaptable to all popular wafer sizes, customized system solution
  • RF-Bandwith up to 550 MHz
  • Up to 625x magnification
  • Simple operation with Windows 7 multilingual graphical user interface
  • Scanfield (and other parameters) customizable
  • Equipped with all safety installations necessary for production environments
  • Multihead system on request